Pembersih Gas/Sistem Pemurnian/Generator dengan Kemurnian Ultra Tinggi
Bidang aplikasi: semikonduktor elektronik, sirkuit terpadu skala besar, MAMS, silikon monokristalin, silikon polikristalin, dan epitaksi silikon, LED, TFT, galium nitrida, silikon karbida, penelitian dan pengembangan ilmiah, analisis eksperimental, dll.
Pembersih Gas/Sistem Pemurnian/Generator dengan Kemurnian Ultra Tinggi
Karakteristik
● Dua menara bergantian melakukan regenerasi adsorpsi, operasi kontinu otomatis. |  |
Parameter Tabel
| Model seri | Untuk gas | Indeks gas mentah | Indeks gas produk | |||||||||||
| N2 | H2 | ITU2 | Dengan | Dia | ITU2 | H2ITU | BERSAMA2 | BERSAMA | CH4 | H2 | N2 | Granularitas | ||
| 9VV | ● | ● | ● | ● | ● | 5N | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | — | ≤0,1ppb | — | 0,003mM |
| 9OVV | ● | — | ● | ● | ● | 5N | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | — | 0,003mM |
| 9VVX | — | — | — | ● | ● | 5N | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | ≤0,1ppb | 0,003mM |
| — | ● | — | — | — | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | 0.003μm | ||
| 9X | — | — | — | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | 0.003μm |
| — | ● | — | — | — | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | 0.003μm | ||
| Note: Common flow specifications：1-20000Nm3/h;Commonly used pressure：1-20Mpa | ||||||||||||||
